Invention Application
- Patent Title: METHOD OF PERFORMING MODEL-BASED SCANNER TUNING
- Patent Title (中): 执行基于模型的扫描仪调谐的方法
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Application No.: US14880018Application Date: 2015-10-09
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Publication No.: US20160033872A1Publication Date: 2016-02-04
- Inventor: Jun YE , Yu Cao
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A model-based tuning method for tuning a first lithography system utilizing a reference lithography system, each of which has tunable parameters for controlling imaging performance. The method includes the steps of defining a test pattern and an imaging model; imaging the test pattern utilizing the reference lithography system and measuring the imaging results; imaging the test pattern utilizing the first lithography system and measuring the imaging results; calibrating the imaging model utilizing the imaging results corresponding to the reference lithography system, where the calibrated imaging model has a first set of parameter values; tuning the calibrated imaging model utilizing the imaging results corresponding to the first lithography system, where the tuned calibrated model has a second set of parameter values; and adjusting the parameters of the first lithography system based on a difference between the first set of parameter values and the second set of parameter values.
Public/Granted literature
- US09921485B2 Method of performing model-based scanner tuning Public/Granted day:2018-03-20
Information query
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