发明申请
- 专利标题： WAFER CARRIER WITH INDEPENDENT ISOLATED HEATER ZONES
- 专利标题（中）： 带独立隔离加热器区域的拖车
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申请号： US14614199申请日： 2015-02-04
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公开(公告)号： US20160035544A1公开(公告)日： 2016-02-04
- 发明人: Dmitry Lubomirsky , Son T. Nguyen , Anh N. Nguyen , David Palagashvill
- 申请人： Dmitry Lubomirsky , Son T. Nguyen , Anh N. Nguyen , David Palagashvill
- 主分类号： H01J37/32
- IPC分类号： H01J37/32 ; H01L21/687 ; C23C16/52 ; H01L21/67 ; C23C16/458 ; C23C16/46
摘要：
A wafer carrier is described with independent isolated heater zones. In one example, the carrier has a puck to carry a workpiece for fabrication processes, a heater plate having a plurality of thermally isolated blocks each thermally coupled to the puck, and each having a heater to heat a respective block of the heater plate, and a cooling plate fastened to and thermally coupled to the heater plate, the cooling plate having a cooling channel to carry a heat transfer fluid to transfer heat from the cooling plate.
公开/授权文献
- US10431435B2 Wafer carrier with independent isolated heater zones 公开/授权日：2019-10-01