Invention Application
US20160035863A1 METHODS OF FORMING STRESSED CHANNEL REGIONS FOR A FINFET SEMICONDUCTOR DEVICE AND THE RESULTING DEVICE
有权
形成用于FINFET半导体器件和结果器件的应力通道区域的方法
- Patent Title: METHODS OF FORMING STRESSED CHANNEL REGIONS FOR A FINFET SEMICONDUCTOR DEVICE AND THE RESULTING DEVICE
- Patent Title (中): 形成用于FINFET半导体器件和结果器件的应力通道区域的方法
-
Application No.: US14883049Application Date: 2015-10-14
-
Publication No.: US20160035863A1Publication Date: 2016-02-04
- Inventor: Xiuyu Cai , Ruilong Xie , Ajey P. Jacob , Witold P. Maszara , Kangguo Cheng , Ali Khakifirooz
- Applicant: GLOBALFOUNDRIES Inc. , International Business Machines Corporation
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/165 ; H01L21/02 ; H01L29/78 ; H01L21/762

Abstract:
An illustrative method includes forming a FinFET device above structure comprising a semiconductor substrate, a first epi semiconductor material and a second epi semiconductor material that includes forming an initial fin structure that comprises portions of the semiconductor substrate, the first epi material and the second epi material, recessing a layer of insulating material such that a portion, but not all, of the second epi material portion of the initial fin structure is exposed so as to define a final fin structure, forming a gate structure above and around the final fin structure, removing the first epi material of the initial fin structure and thereby define an under-fin cavity under the final fin structure and substantially filling the under-fin cavity with a stressed material.
Public/Granted literature
- US09349840B2 Methods of forming stressed channel regions for a FinFET semiconductor device and the resulting device Public/Granted day:2016-05-24
Information query
IPC分类: