Invention Application
- Patent Title: PIEZOELECTRIC ACOUSTIC RESONATOR BASED SENSOR
- Patent Title (中): 基于压电声学谐振器的传感器
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Application No.: US14453326Application Date: 2014-08-06
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Publication No.: US20160041047A1Publication Date: 2016-02-11
- Inventor: Fang Liu , Julius Ming-Lin Tsai , Xiang Li , Mike Daneman
- Applicant: INVENSENSE, INC.
- Main IPC: G01L1/16
- IPC: G01L1/16

Abstract:
A piezoelectric acoustic resonator based sensor is presented herein. A device can include an array of piezoelectric transducers and an array of cavities that has been attached to the array of piezoelectric transducers to form an array of resonators. A resonator of the array of resonators can be associated with a first frequency response corresponding to a first determination that the resonator has been touched, and a second frequency response corresponding to a second determination that the resonator has not been touched. The array of piezoelectric transducers can include a piezoelectric material; a first set of electrodes that has been formed a first side of the piezoelectric material; and a second set of electrodes that has been formed on second side of the piezoelectric material.
Public/Granted literature
- US09618405B2 Piezoelectric acoustic resonator based sensor Public/Granted day:2017-04-11
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