Invention Application
US20160041089A1 SYSTEMS AND METHODS UTILIZING LONG WAVELENGTH ELECTROMAGNETIC RADIATION FOR FEATURE DEFINITION
审中-公开
利用长波长电磁辐射进行特征定义的系统和方法
- Patent Title: SYSTEMS AND METHODS UTILIZING LONG WAVELENGTH ELECTROMAGNETIC RADIATION FOR FEATURE DEFINITION
- Patent Title (中): 利用长波长电磁辐射进行特征定义的系统和方法
-
Application No.: US14454979Application Date: 2014-08-08
-
Publication No.: US20160041089A1Publication Date: 2016-02-11
- Inventor: Minna Hovinen , Mathias Schubert , Gerald Finken , Greg Schmitz , Tino Hofmann , Stefan Schöche
- Applicant: Minna Hovinen , Mathias Schubert , Gerald Finken , Greg Schmitz , Tino Hofmann , Stefan Schöche
- Main IPC: G01N21/25
- IPC: G01N21/25 ; H01J37/305
Abstract:
Methods that include directing an incident beam towards a substrate, the substrate having one or more features formed thereon wherein the incident beam has a wavelength from about 10 μm to about 10 mm, and the incident beam interacts with the substrate to form a modulated beam; varying one or more characteristics of the incident beam while directed towards the substrate; detecting the modulated beam while varying the one or more characteristics of the incident beam to collect a spectrum; and determining at least one spatial metric of the at least one feature based on the collected spectrum.
Information query
