公开(公告)号：US20160041089A1

公开(公告)日：2016-02-11

申请号：US14454979

申请日：2014-08-08

申请人： Minna Hovinen ,  Mathias Schubert ,  Gerald Finken ,  Greg Schmitz ,  Tino Hofmann ,  Stefan Schöche

发明人： Minna Hovinen ,  Mathias Schubert ,  Gerald Finken ,  Greg Schmitz ,  Tino Hofmann ,  Stefan Schöche

IPC分类号： G01N21/25 ,  H01J37/305

CPC分类号： H01J37/3053 ,  G01N21/211 ,  G01N21/3581

摘要： Methods that include directing an incident beam towards a substrate, the substrate having one or more features formed thereon wherein the incident beam has a wavelength from about 10 μm to about 10 mm, and the incident beam interacts with the substrate to form a modulated beam; varying one or more characteristics of the incident beam while directed towards the substrate; detecting the modulated beam while varying the one or more characteristics of the incident beam to collect a spectrum; and determining at least one spatial metric of the at least one feature based on the collected spectrum.

摘要翻译： 包括将入射光束引向衬底的方法，所述衬底具有形成在其上的一个或多个特征，其中所述入射光束具有约10μm至约10mm的波长，并且所述入射光束与所述衬底相互作用以形成调制光束; 改变入射光束的一个或多个特性，同时指向衬底; 在改变入射光束的一个或多个特性以收集光谱的同时检测调制光束; 以及基于所收集的频谱来确定所述至少一个特征的至少一个空间度量。