Invention Application
US20160041366A1 AUTOFOCUS DEVICE AND SAMPLE OBSERVATION DEVICE 有权
自动装置和样品观察装置

AUTOFOCUS DEVICE AND SAMPLE OBSERVATION DEVICE
Abstract:
The autofocus device for a sample observation device provided with an objective is provided with a photodetector, an autofocus optical system that includes a tube lens, that guides light to one of two regions of a pupil plane of the objective that has been divided into two, and that guides light that has passed through the other region after being reflected by a sample to the photodetector, and a light shielding member which is arranged between the tube lens and a light receiving plane of the photodetector and on which an aperture has been formed. The autofocus device satisfies 2.1
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