Invention Application
- Patent Title: MOLECULAR SELF-ASSEMBLY IN SUBSTRATE PROCESSING
- Patent Title (中): 分子自组装在基板加工中
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Application No.: US14885002Application Date: 2015-10-16
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Publication No.: US20160042991A1Publication Date: 2016-02-11
- Inventor: Tony P. Chiang , Majid Keshavarz , David E. Lazovsky
- Applicant: Intermolecular Inc.
- Main IPC: H01L21/768
- IPC: H01L21/768

Abstract:
Methods for sealing a porous dielectric are presented including: receiving a substrate, the substrate including the porous dielectric; exposing the substrate to an organosilane, where the organosilane includes a hydrolysable group for facilitating attachment with the porous dielectric, and where the organosilane does not include an alkyl group; and forming a layer as a result of the exposing to seal the porous dielectric. In some embodiments, methods are presented where the organosilane includes: alkynyl groups, aryl groups, flouroalkyl groups, heteroarlyl groups, alcohol groups, thiol groups, amine groups, thiocarbamate groups, ester groups, ether groups, sulfide groups, and nitrile groups. In some embodiments, method further include: removing contamination from the porous dielectric and a conductive region of the substrate prior to the exposing; and removing contamination from the conductive region after the forming.
Public/Granted literature
- US09362231B2 Molecular self-assembly in substrate processing Public/Granted day:2016-06-07
Information query
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