发明申请
- 专利标题: THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING OF THE SAME
- 专利标题(中): 薄膜晶体管及其制造方法
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申请号: US14637224申请日: 2015-03-03
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公开(公告)号: US20160043233A1公开(公告)日: 2016-02-11
- 发明人: Suk Hoon Ku , Hyunduck Cho
- 申请人: SAMSUNG DISPLAY CO., LTD.
- 优先权: KR10-2014-0101792 20140807
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L29/423 ; H01L29/36 ; H01L21/3213 ; H01L21/283 ; H01L29/417 ; H01L29/66 ; H01L21/311
摘要:
Provided are a thin film transistor (TFT) and a method of manufacturing the TFT. The TFT includes a substrate; a first conductive type semiconductor layer on the substrate and having a recess; second conductive type spacers at opposite side walls in the recess; a main semiconductor layer covering the first conductive type semiconductor layer and the second conductive type spacers and comprising a channel region and source and drain regions; a gate insulating layer on the main semiconductor layer; and a gate electrode on the gate insulating layer and corresponding to the recess.
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