Invention Application
- Patent Title: THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING OF THE SAME
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US14637224Application Date: 2015-03-03
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Publication No.: US20160043233A1Publication Date: 2016-02-11
- Inventor: Suk Hoon Ku , Hyunduck Cho
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Priority: KR10-2014-0101792 20140807
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/423 ; H01L29/36 ; H01L21/3213 ; H01L21/283 ; H01L29/417 ; H01L29/66 ; H01L21/311

Abstract:
Provided are a thin film transistor (TFT) and a method of manufacturing the TFT. The TFT includes a substrate; a first conductive type semiconductor layer on the substrate and having a recess; second conductive type spacers at opposite side walls in the recess; a main semiconductor layer covering the first conductive type semiconductor layer and the second conductive type spacers and comprising a channel region and source and drain regions; a gate insulating layer on the main semiconductor layer; and a gate electrode on the gate insulating layer and corresponding to the recess.
Public/Granted literature
- US10020402B2 Thin film transistor and method of manufacturing of the same Public/Granted day:2018-07-10
Information query
IPC分类: