Invention Application
US20160054352A1 MULTI-AXIS SENSOR AND METHOD FOR MANUFACTURING THE SAME 审中-公开
多轴传感器及其制造方法

MULTI-AXIS SENSOR AND METHOD FOR MANUFACTURING THE SAME
Abstract:
There are provided a multi-axis sensor and a method for manufacturing the same. The multi-axis sensor includes: a first sensor mounted on a board and detecting inertial force; and a second sensor mounted on the board and detecting a position and a motion, wherein the first sensor and the board have a seal formed therebetween so as to prevent permeation from the outside and are electrically connected to each other.
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