Invention Application
- Patent Title: MULTI-AXIS SENSOR AND METHOD FOR MANUFACTURING THE SAME
- Patent Title (中): 多轴传感器及其制造方法
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Application No.: US14590994Application Date: 2015-01-07
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Publication No.: US20160054352A1Publication Date: 2016-02-25
- Inventor: Pil Joong KANG , Je Hong KYOUNG , Masayoshi ESASHI , Jung Won LEE
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD. , TOHOKU UNIVERSITY
- Applicant Address: KR Suwon-Si JP Sendai-shi
- Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.,TOHOKU UNIVERSITY
- Current Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.,TOHOKU UNIVERSITY
- Current Assignee Address: KR Suwon-Si JP Sendai-shi
- Priority: KR10-2014-0111002 20140825
- Main IPC: G01P15/12
- IPC: G01P15/12 ; G01R33/12 ; H01L43/00 ; H01L41/23 ; H01L41/113 ; G01P15/14 ; G01L9/00

Abstract:
There are provided a multi-axis sensor and a method for manufacturing the same. The multi-axis sensor includes: a first sensor mounted on a board and detecting inertial force; and a second sensor mounted on the board and detecting a position and a motion, wherein the first sensor and the board have a seal formed therebetween so as to prevent permeation from the outside and are electrically connected to each other.
Information query
IPC分类: