Invention Application
US20160054662A1 PROJECTION EXPOSURE APPARATUS WITH A HIGHLY FLEXIBLE MANIPULATOR
审中-公开
投影曝光装置与高灵活的操纵器
- Patent Title: PROJECTION EXPOSURE APPARATUS WITH A HIGHLY FLEXIBLE MANIPULATOR
- Patent Title (中): 投影曝光装置与高灵活的操纵器
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Application No.: US14837142Application Date: 2015-08-27
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Publication No.: US20160054662A1Publication Date: 2016-02-25
- Inventor: Alexander Wolf , Toralf Gruner , Boris Bittner , Norbert Wabra
- Applicant: Carl Zeiss SMT GmbH
- Priority: DE102013204572.7 20130315
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
The invention relates to a projection exposure apparatus for semiconductor lithography, comprising at least one manipulator for reducing image aberrations, wherein the manipulator has at least two optical elements that can be positioned relative to one another, wherein at least one of the optical elements is spatially dependent in terms of its effect on an optical wavefront passing therethrough such that a local phase change of a wavefront propagating in the optical system is produced in the case of a relative movement of the optical elements against one another. Here, the spatially dependent effect of the at least one optical element can be set in a reversible dynamic manner.
Public/Granted literature
- US10261425B2 Projection exposure apparatus with a highly flexible manipulator Public/Granted day:2019-04-16
Information query
IPC分类: