Invention Application
US20160054663A1 SOURCE COLLECTOR APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD 有权
源收集器装置,光刻装置和方法

SOURCE COLLECTOR APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD
Abstract:
A source collector apparatus for use in a lithographic apparatus includes a fuel droplet generator configured in use to generate a stream of fuel droplets directed from an outlet of the fuel droplet generator towards a plasma formation location. In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (e.g., hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, a detection apparatus may be provided as part of a shroud to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.
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