公开(公告)号：US20160054663A1

公开(公告)日：2016-02-25

申请号：US14781262

申请日：2014-03-05

Applicant: ASML NETHERLANDS B.V.

Inventor： Niek Antonius Jacobus Maria KLEEMANS ,  Denis Alexandrovich GLUSHKOV ,  Ronald Johannes HULTERMANS ,  Benedictus Mathijs RENKENS ,  Gerardus Hubertus Petrus Maria SWINKELS ,  Christiaan Johannes Petrus VERSPEEK

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A source collector apparatus for use in a lithographic apparatus includes a fuel droplet generator configured in use to generate a stream of fuel droplets directed from an outlet of the fuel droplet generator towards a plasma formation location. In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (e.g., hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, a detection apparatus may be provided as part of a shroud to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.

Abstract translation: 用于光刻设备的源极收集器装置包括燃料液滴发生器，其构造成用于产生从燃料液滴发生器的出口朝向等离子体形成位置引导的燃料液滴流。 为了防止液滴卫星干扰等离子体形成，提供气体供应，其在使用中提供将任何液滴卫星偏离燃料液滴流的气体（例如氢气）流。 另外，检测装置可以被设置为护罩的一部分，以确定出现燃料液滴聚结的点，从而提供卫星液滴存在于燃料液滴流中的可能性的指示。

公开(公告)号：US20180120711A1

公开(公告)日：2018-05-03

申请号：US15803448

申请日：2017-11-03

Applicant: ASML Netherlands B.V.

Inventor： Niek Antonius Jacobus Maria KLEEMANS ,  Denis Alexandrovich GLUSHKOV ,  Ronald Johannes HULTERMANS ,  Benedictus Mathijs RENKENS ,  Gerardus Hubertus Petrus Maria SWINKELS ,  Christiaan Johannes Petrus VERSPEEK

IPC: G03F7/20 ,  H05G2/00

CPC classification number: G03F7/70033 ,  H05G2/003 ,  H05G2/008

Abstract: A source collector apparatus for use in a lithographic apparatus includes a fuel droplet generator configured in use to generate a stream of fuel droplets directed from an outlet of the fuel droplet generator towards a plasma formation location. In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (e.g., hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, a detection apparatus may be provided as part of a shroud to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.