Invention Application
- Patent Title: CROSS-POINT MEMORY AND METHODS FOR FABRICATION OF SAME
- Patent Title (中): 跨点存储器及其制造方法
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Application No.: US14468036Application Date: 2014-08-25
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Publication No.: US20160056208A1Publication Date: 2016-02-25
- Inventor: Fabio Pellizzer , Innocenzo Tortorelli , Andrea Ghetti
- Applicant: MICRON TECHNOLOGY, INC.
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
The disclosed technology generally relates to integrated circuit devices, and in particular to cross-point memory arrays and methods for fabricating the same. Line stacks are formed, including a storage material line disposed over lower a conductive line. Upper conductive lines are formed over and crossing the line stacks, exposing portions of the line stacks between adjacent upper conductive lines. After forming the upper conductive lines, storage elements are formed at intersections between the lower conductive lines and the upper conductive lines by removing storage materials from exposed portions of the line stacks, such that each storage element is laterally surrounded by spaces. A continuous sealing material laterally surrounds each of the storage elements.
Public/Granted literature
- US09768378B2 Cross-point memory and methods for fabrication of same Public/Granted day:2017-09-19
Information query
IPC分类: