Invention Application
US20160056265A1 METHODS OF MAKING A SELF-ALIGNED CHANNEL DRIFT DEVICE 有权
制造自对准通道DRIFT设备的方法

METHODS OF MAKING A SELF-ALIGNED CHANNEL DRIFT DEVICE
Abstract:
An isolation region is formed in a semiconductor substrate to laterally define and electrically isolate a device region and first and second laterally adjacent well regions are formed in the device region. A gate structure is formed above the device region such that the first well region extends below an entirety of the gate structure and a well region interface formed between the first and second well regions is laterally offset from a drain-side edge of the gate structure. Source and drain regions are formed in the device region such that the source region extends laterally from a source-side edge of the gate structure and across a first portion of the first well region to a first inner edge of the isolation region and the drain region extends laterally from the drain-side edge and across a second portion of the first well region.
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