发明申请
- 专利标题： COATINGS FOR RELATIVELY MOVABLE SURFACES
- 专利标题（中）： 涂层相对移动表面
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申请号： US14844779申请日： 2015-09-03
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公开(公告)号： US20160060108A1公开(公告)日： 2016-03-03
- 发明人: William Robert MORRISON , Mark Christopher FISHER , Murali Hanabe , Ganapathy Subramaniam SIVAKUMAR , Simon Joshua JACOBS
- 申请人： TEXAS INSTRUMENTS INCORPORATED
- 主分类号： B81C1/00
- IPC分类号： B81C1/00
摘要：
A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.
公开/授权文献
- US09487397B2 Coatings for relatively movable surfaces 公开/授权日：2016-11-08
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