发明申请
US20160061724A1 OPTICAL OBSERVATION APPARATUS AND OPTICAL OBSERVATION METHOD 有权
光学观察装置和光学观测方法

  • 专利标题: OPTICAL OBSERVATION APPARATUS AND OPTICAL OBSERVATION METHOD
  • 专利标题(中): 光学观察装置和光学观测方法
  • 申请号: US14835229
    申请日: 2015-08-25
  • 公开(公告)号: US20160061724A1
    公开(公告)日: 2016-03-03
  • 发明人: Yutaka MIKI
  • 申请人: MITUTOYO CORPORATION
  • 优先权: JP2014-178284 20140902
  • 主分类号: G01N21/47
  • IPC分类号: G01N21/47
OPTICAL OBSERVATION APPARATUS AND OPTICAL OBSERVATION METHOD
摘要:
Optical observation apparatus includes: light source emitting broadband light; image fiber with first and second end faces, wherein end faces of plural cores are two-dimensionally arrayed in first and second end faces; imaging optical system provided on first end face side of image fiber, causing light from first end face to be imaged on imaging plane; and axial aberration optical system provided on second end face side of image fiber, having an axial chromatic aberration on optical axis, and causing light from second end face toward object to be observed to be converged. Image fiber takes light from light source from first end face, and transmits light to second end face, and takes light, reflected and scattered by a surface of object, converged by axial aberration optical system, and focused for each plural core on second end face, from second end face and transmits light to first end face.
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