发明申请
US20160068399A1 METHODS FOR SEPARATING HALOSILANES 审中-公开
分离HALOSILANES的方法

METHODS FOR SEPARATING HALOSILANES
摘要:
Methods for separating halosilanes that involve use of a distillation column having a partition that divides the column into portions for producing three product fractions are disclosed. Methods and systems for producing silane by disproportionation of halosilanes that use such columns and methods for producing polycrystalline silicon are also disclosed.
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