发明申请
US20160071708A1 METHOD AND APPARATUS FOR SURFACE PROCESSING OF A SUBSTRATE USING AN ENERGETIC PARTICLE BEAM
审中-公开
使用能量粒子束的基板的表面处理方法和装置
- 专利标题： METHOD AND APPARATUS FOR SURFACE PROCESSING OF A SUBSTRATE USING AN ENERGETIC PARTICLE BEAM
- 专利标题（中）： 使用能量粒子束的基板的表面处理方法和装置
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申请号： US14941897申请日： 2015-11-16
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公开(公告)号： US20160071708A1公开(公告)日： 2016-03-10
- 发明人: Boris L. Druz , Piero Sferlazzo , Roger P. Fremgen , Alan V. Hayes , Viktor Kanarov , Robert Krause , Ira Reiss
- 申请人： Boris L. Druz , Piero Sferlazzo , Roger P. Fremgen , Alan V. Hayes , Viktor Kanarov , Robert Krause , Ira Reiss
- 申请人地址： US NY Plainview
- 专利权人： Veeco Instruments, Inc.
- 当前专利权人： Veeco Instruments, Inc.
- 当前专利权人地址： US NY Plainview
- 主分类号： H01J37/34
- IPC分类号： H01J37/34 ; H01J37/32 ; C23C14/46
摘要：
Method and apparatus for processing a substrate with an energetic particle beam. Features on the substrate are oriented relative to the energetic particle beam and the substrate is scanned through the energetic particle beam. The substrate is periodically indexed about its azimuthal axis of symmetry, while shielded from exposure to the energetic particle beam, to reorient the features relative to the major dimension of the beam.
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