Invention Application
- Patent Title: FIN-SHAPED STRUCTURE AND MANUFACTURING METHOD THEREOF
- Patent Title (中): 精细形状结构及其制造方法
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Application No.: US14512475Application Date: 2014-10-13
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Publication No.: US20160071844A1Publication Date: 2016-03-10
- Inventor: Wen-Jiun Shen , Ssu-I Fu , Yen-Liang Wu , Chia-Jong Liu , Yu-Hsiang Hung , Chung-Fu Chang , Man-Ling Lu , Yi-Wei Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Priority: CN201410454915.X 20140909
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/308 ; H01L21/306 ; H01L21/8234 ; H01L21/8236
Abstract:
A fin-shaped structure includes a substrate having a first fin-shaped structure located in a first area and a second fin-shaped structure located in a second area, wherein the second fin-shaped structure includes a ladder-shaped cross-sectional profile part. The present invention also provides two methods of forming this fin-shaped structure. In one case, a substrate having a first fin-shaped structure and a second fin-shaped structure is provided. A treatment process is performed to modify an external surface of the top of the second fin-shaped structure, thereby forming a modified part. A removing process is performed to remove the modified part through a high removing selectivity to the first fin-shaped structure and the second fin-shaped structure, and the modified part, thereby the second fin-shaped structure having a ladder-shaped cross-sectional profile part is formed.
Public/Granted literature
- US09786510B2 Fin-shaped structure and manufacturing method thereof Public/Granted day:2017-10-10
Information query
IPC分类:
