Invention Application
- Patent Title: IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE
- Patent Title (中): 印刷装置,印刷系统和制造方法
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Application No.: US14835147Application Date: 2015-08-25
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Publication No.: US20160075076A1Publication Date: 2016-03-17
- Inventor: Hiroshi Sato , Hiroshi Morohoshi , Yukio Takabayashi
- Applicant: CANON KABUSHIKI KAISHA
- Priority: JP2014-187031 20140912; JP2015-160957 20150818
- Main IPC: B29C59/02
- IPC: B29C59/02

Abstract:
The present invention provides an imprint apparatus which performs an imprint process for forming a pattern on an imprint material on a substrate using a mold, the apparatus including an obtaining unit configured to obtain each shape of a plurality of shot regions on the substrate before the mold and the shot region as an imprint target on the substrate face each other, a first correction unit configured to correct, for each shot region on the substrate, a shape difference between a pattern of the mold and the shot region, a measurement unit configured to measure a displacement between the pattern of the mold and the shot region on the substrate, a second correction unit configured to correct the displacement, and a control unit configured to control the imprint process.
Public/Granted literature
- US10331027B2 Imprint apparatus, imprint system, and method of manufacturing article Public/Granted day:2019-06-25
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