Invention Application
US20160075076A1 IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE 审中-公开
印刷装置,印刷系统和制造方法

  • Patent Title: IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE
  • Patent Title (中): 印刷装置,印刷系统和制造方法
  • Application No.: US14835147
    Application Date: 2015-08-25
  • Publication No.: US20160075076A1
    Publication Date: 2016-03-17
  • Inventor: Hiroshi SatoHiroshi MorohoshiYukio Takabayashi
  • Applicant: CANON KABUSHIKI KAISHA
  • Priority: JP2014-187031 20140912; JP2015-160957 20150818
  • Main IPC: B29C59/02
  • IPC: B29C59/02
IMPRINT APPARATUS, IMPRINT SYSTEM, AND METHOD OF MANUFACTURING ARTICLE
Abstract:
The present invention provides an imprint apparatus which performs an imprint process for forming a pattern on an imprint material on a substrate using a mold, the apparatus including an obtaining unit configured to obtain each shape of a plurality of shot regions on the substrate before the mold and the shot region as an imprint target on the substrate face each other, a first correction unit configured to correct, for each shot region on the substrate, a shape difference between a pattern of the mold and the shot region, a measurement unit configured to measure a displacement between the pattern of the mold and the shot region on the substrate, a second correction unit configured to correct the displacement, and a control unit configured to control the imprint process.
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