Invention Application
US20160076989A1 CORROSION SENSOR RETAINER ASSEMBLY APPARATUS AND METHOD FOR DETECTING CORROSION
有权
腐蚀传感器保持器组装装置和检测腐蚀的方法
- Patent Title: CORROSION SENSOR RETAINER ASSEMBLY APPARATUS AND METHOD FOR DETECTING CORROSION
- Patent Title (中): 腐蚀传感器保持器组装装置和检测腐蚀的方法
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Application No.: US14489148Application Date: 2014-09-17
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Publication No.: US20160076989A1Publication Date: 2016-03-17
- Inventor: Mark Taskar , Iqbal Shareef , Anthony Zemlock
- Applicant: Lam Research Corporation
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Main IPC: G01N17/00
- IPC: G01N17/00 ; H01L21/66

Abstract:
A corrosion sensor retainer assembly and method for predicting and detecting corrosion within a gas delivery system of a semiconductor substrate processing apparatus. The corrosion sensor retainer assembly comprises a laminate that includes a first insulating layer with a first port and a second insulating layer with a second port, wherein the first port and the second port are configured to retain a seal. The corrosion sensor retainer assembly includes a conductor housed within the laminate. The conductor forms a path that extends around the first port and the second port. At least a portion of the conductor has an exposed surface with a property that changes in the presence of corrosive gas or acid.
Public/Granted literature
- US09704761B2 Corrosion sensor retainer assembly apparatus and method for detecting corrosion Public/Granted day:2017-07-11
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