Invention Application
US20160076989A1 CORROSION SENSOR RETAINER ASSEMBLY APPARATUS AND METHOD FOR DETECTING CORROSION 有权
腐蚀传感器保持器组装装置和检测腐蚀的方法

CORROSION SENSOR RETAINER ASSEMBLY APPARATUS AND METHOD FOR DETECTING CORROSION
Abstract:
A corrosion sensor retainer assembly and method for predicting and detecting corrosion within a gas delivery system of a semiconductor substrate processing apparatus. The corrosion sensor retainer assembly comprises a laminate that includes a first insulating layer with a first port and a second insulating layer with a second port, wherein the first port and the second port are configured to retain a seal. The corrosion sensor retainer assembly includes a conductor housed within the laminate. The conductor forms a path that extends around the first port and the second port. At least a portion of the conductor has an exposed surface with a property that changes in the presence of corrosive gas or acid.
Information query
Patent Agency Ranking
0/0