Invention Application
US20160082472A1 PROCESS FOR MANUFACTURING SELF-ASSEMBLED BLOCK COPOLYMER FILMS 有权
制造自组装块状共聚物膜的方法

PROCESS FOR MANUFACTURING SELF-ASSEMBLED BLOCK COPOLYMER FILMS
Abstract:
Self-assembled block copolymer films having two or more blocks are manufactured by distributing a solution containing at least one block copolymer onto the substrate so as to partially coat a substrate surface, obtaining an intermediate product. A block copolymer is self-assembled by heating the intermediate product. The self-assembling step includes Rapid Thermal Processing, which is performed by heating the intermediate product up to a first target temperature, ranging from a glass transition temperature to an order-disorder transition temperature of the block copolymer, through a temperature rising ramp having a rate of temperature change not lower than 5° C./second; maintaining the intermediate product at the target temperature for a time interval not longer than 60 minutes, whereby a sample is obtained on the surface of which a self-assembled film of the block copolymer has been made; and cooling the sample down to the ambient temperature through a temperature descending ramp.
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