Invention Application
- Patent Title: PROCESS FOR MANUFACTURING SELF-ASSEMBLED BLOCK COPOLYMER FILMS
- Patent Title (中): 制造自组装块状共聚物膜的方法
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Application No.: US14890240Application Date: 2014-05-09
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Publication No.: US20160082472A1Publication Date: 2016-03-24
- Inventor: Michele Perego , Gabriele Seguini , Federico Ferrarese Lupi
- Applicant: CONSIGLIO NAZIONALE DELLE RICERCHE
- Priority: ITRM2013A000278 20130510
- International Application: PCT/IB2014/061324 WO 20140509
- Main IPC: B05D3/06
- IPC: B05D3/06 ; B05D1/00 ; B05D3/00 ; C09D153/00

Abstract:
Self-assembled block copolymer films having two or more blocks are manufactured by distributing a solution containing at least one block copolymer onto the substrate so as to partially coat a substrate surface, obtaining an intermediate product. A block copolymer is self-assembled by heating the intermediate product. The self-assembling step includes Rapid Thermal Processing, which is performed by heating the intermediate product up to a first target temperature, ranging from a glass transition temperature to an order-disorder transition temperature of the block copolymer, through a temperature rising ramp having a rate of temperature change not lower than 5° C./second; maintaining the intermediate product at the target temperature for a time interval not longer than 60 minutes, whereby a sample is obtained on the surface of which a self-assembled film of the block copolymer has been made; and cooling the sample down to the ambient temperature through a temperature descending ramp.
Public/Granted literature
- US09962733B2 Process for manufacturing self-assembled block copolymer films Public/Granted day:2018-05-08
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