公开(公告)号：US09962733B2

公开(公告)日：2018-05-08

申请号：US14890240

申请日：2014-05-09

Applicant: CONSIGLIO NAZIONALE DELLE RICERCHE

Inventor： Michele Perego ,  Gabriele Seguini ,  Federico Ferrarese Lupi

IPC: B05D3/06 ,  C09D153/00 ,  G03F7/00 ,  B05D1/00 ,  B05D3/00 ,  B82Y30/00 ,  B82Y40/00

CPC classification number: B05D3/06 ,  B05D1/005 ,  B05D3/007 ,  B82Y30/00 ,  B82Y40/00 ,  C09D153/00 ,  G03F7/0002

Abstract: Self-assembled block copolymer films having two or more blocks are manufactured by distributing a solution containing at least one block copolymer onto the substrate so as to partially coat a substrate surface, obtaining an intermediate product. A block copolymer is self-assembled by heating the intermediate product. The self-assembling step includes Rapid Thermal Processing, which is performed by heating the intermediate product up to a first target temperature, ranging from a glass transition temperature to an order-disorder transition temperature of the block copolymer, through a temperature rising ramp having a rate of temperature change not lower than 5° C./second; maintaining the intermediate product at the target temperature for a time interval not longer than 60 minutes, whereby a sample is obtained on the surface of which a self-assembled film of the block copolymer has been made; and cooling the sample down to the ambient temperature through a temperature descending ramp.

公开(公告)号：US20160082472A1

公开(公告)日：2016-03-24

申请号：US14890240

申请日：2014-05-09

Applicant: CONSIGLIO NAZIONALE DELLE RICERCHE

Inventor： Michele Perego ,  Gabriele Seguini ,  Federico Ferrarese Lupi

IPC: B05D3/06 ,  B05D1/00 ,  B05D3/00 ,  C09D153/00

CPC classification number: B05D3/06 ,  B05D1/005 ,  B05D3/007 ,  B82Y30/00 ,  B82Y40/00 ,  C09D153/00 ,  G03F7/0002

Abstract: Self-assembled block copolymer films having two or more blocks are manufactured by distributing a solution containing at least one block copolymer onto the substrate so as to partially coat a substrate surface, obtaining an intermediate product. A block copolymer is self-assembled by heating the intermediate product. The self-assembling step includes Rapid Thermal Processing, which is performed by heating the intermediate product up to a first target temperature, ranging from a glass transition temperature to an order-disorder transition temperature of the block copolymer, through a temperature rising ramp having a rate of temperature change not lower than 5° C./second; maintaining the intermediate product at the target temperature for a time interval not longer than 60 minutes, whereby a sample is obtained on the surface of which a self-assembled film of the block copolymer has been made; and cooling the sample down to the ambient temperature through a temperature descending ramp.

Abstract translation: 具有两个或更多个嵌段的自组装嵌段共聚物膜通过将含有至少一种嵌段共聚物的溶液分布到基材上来制造，以便部分地涂覆基材表面，获得中间产物。 通过加热中间产物自组装嵌段共聚物。 自组装步骤包括快速热处理，其通过将中间产物加热至第一目标温度（范围从玻璃化转变温度至嵌段共聚物的有序 - 无序转变温度），通过具有 温度变化率不低于5℃/秒; 将中间产物保持在目标温度下不超过60分钟的时间间隔，从而在其表面上获得嵌段共聚物的自组装膜的样品; 并通过温度下降斜坡将样品冷却至环境温度。