发明申请
- 专利标题： RETAINER AND WAFER CARRIER INCLUDING THE SAME
- 专利标题（中）： 保持架和滚动架，包括它们
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申请号： US14729030申请日： 2015-06-02
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公开(公告)号： US20160082569A1公开(公告)日： 2016-03-24
- 发明人: Sang-Hyun BAE , Kyu-Dong JUNG , Il-Hwan KIM , Jung-Hwan KIM , Hyuek-Jae LEE , Tae-Je CHO
- 申请人： Sang-Hyun BAE , Kyu-Dong JUNG , Il-Hwan KIM , Jung-Hwan KIM , Hyuek-Jae LEE , Tae-Je CHO
- 优先权： KR10-2014-0124723 20140919
- 主分类号： B24B37/32
- IPC分类号： B24B37/32
摘要：
A retainer for a wafer carrier comprising: a body including a plurality of slots configured to receive side surfaces of wafers; and for each of the slots, a supporting structure formed on a sidewall of the slot and configured to make contact with the side surfaces of a corresponding wafer, the supporting structure being spaced apart from an upper corner of the side surface of the corresponding wafer.