Invention Application
- Patent Title: MAGAZINE AND PROCESS EQUIPMENT INCLUDING THE SAME
- Patent Title (中): 杂项和工艺设备，包括它们
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Application No.: US14691917Application Date: 2015-04-21
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Publication No.: US20160086828A1Publication Date: 2016-03-24
- Inventor: Yi-sung Hwang , Jun-young Ko , Dong-woo Kang , Se-yeoul Park
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2014-0124633 20140918
- Main IPC: H01L21/673
- IPC: H01L21/673
Abstract:
A magazine includes a main body unit having a front side and a rear side, at least one of which is open, a plurality of slots formed inside two sidewalls of the main body unit, and at least one support member extending to the two sidewalls of the main body unit in a first direction.
Public/Granted literature
- US1269132A Furnace. Public/Granted day:1918-06-11
Information query
IPC分类:
