MAGAZINE AND PROCESS EQUIPMENT INCLUDING THE SAME
    1.
    发明申请
    MAGAZINE AND PROCESS EQUIPMENT INCLUDING THE SAME 审中-公开
    杂项和工艺设备,包括它们

    公开(公告)号:US20160086828A1

    公开(公告)日:2016-03-24

    申请号:US14691917

    申请日:2015-04-21

    CPC classification number: H01L21/6732

    Abstract: A magazine includes a main body unit having a front side and a rear side, at least one of which is open, a plurality of slots formed inside two sidewalls of the main body unit, and at least one support member extending to the two sidewalls of the main body unit in a first direction.

    Abstract translation: 弹匣包括具有前侧和后侧的主体单元,其中至少一个是敞开的,形成在主体单元的两个侧壁内的多个槽,以及至少一个支撑构件,其延伸到主体单元的两个侧壁 主体单元在第一方向上。

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