发明申请
- 专利标题： METHOD FOR COATING A SUBSTRATE AND COATING DEVICE
- 专利标题（中）： 涂覆基材和涂层装置的方法
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申请号： US14861117申请日： 2015-09-22
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公开(公告)号： US20160089691A1公开(公告)日： 2016-03-31
- 发明人: Katrin Fischer , Florian Palitschka , Johannes Platen , Kento Kaneko
- 申请人： SUSS MicroTec Lithography GmbH
- 优先权： DE10-2014113927.5 20140925
- 主分类号： B05D1/02
- IPC分类号： B05D1/02 ; B05B1/12
摘要：
A method for coating a substrate with a lacquer includes spraying lacquer onto the substrate and subsequently spraying the applied lacquer with solvent. In some embodiments, before the solvent is sprayed the lacquer is heated. Also disclosed is a corresponding coating device for lacquering substrates.
公开/授权文献
- US10688524B2 Method for coating a substrate and coating device 公开/授权日：2020-06-23
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