公开(公告)号：US10688524B2

公开(公告)日：2020-06-23

申请号：US14861117

申请日：2015-09-22

申请人： SUSS MicroTec Lithography GmbH

发明人： Katrin Fischer ,  Florian Palitschka ,  Johannes Platen ,  Kento Kaneko

IPC分类号： B05D1/02 ,  B05D3/10

摘要： A method for coating a substrate with a lacquer includes spraying lacquer onto the substrate and subsequently spraying the applied lacquer with solvent. In some embodiments, before the solvent is sprayed the lacquer is heated. Also disclosed is a corresponding coating device for lacquering substrates.

公开(公告)号：US10232405B2

公开(公告)日：2019-03-19

申请号：US14861105

申请日：2015-09-22

申请人： SUSS MicroTec Lithography GmbH

发明人： Katrin Fischer ,  Florian Palitschka ,  Johannes Platen ,  Kento Kaneko

IPC分类号： B05D3/02 ,  B05D3/04 ,  B05D3/10 ,  B05D5/00 ,  B05D7/04 ,  B05D7/26 ,  G03F7/00

摘要： A method for coating a substrate with a lacquer is disclosed. First, the lacquer is uniformly applied to the substrate. Then, the solvent proportion of the lacquer applied to the substrate is reduced, and the coated substrate is exposed to a solvent atmosphere. In some embodiments, the lacquer is heated. The invention also relates to a device for planarizing a lacquer layer.

公开(公告)号：US20160089693A1

公开(公告)日：2016-03-31

申请号：US14861105

申请日：2015-09-22

申请人： SUSS MicroTec Lithography GmbH

发明人： Katrin Fischer ,  Florian Palitschka ,  Johannes Platen ,  Kento Kaneko

IPC分类号： B05D3/00 ,  B05D1/02

CPC分类号： B05D3/0453 ,  B05D3/0254 ,  B05D3/046 ,  B05D3/0466 ,  B05D3/0473 ,  B05D3/0486 ,  B05D3/0493 ,  B05D3/107 ,  B05D5/00 ,  B05D7/04 ,  B05D7/26 ,  G03F7/16

摘要： The disclosure relates to a method for coating a substrate with a lacquer. First, the lacquer is uniformly applied to the substrate. Then, the solvent proportion of the lacquer applied to the substrate is reduced, and the coated substrate is exposed to a solvent atmosphere. In some embodiments, the lacquer is heated. The invention also relates to a device for planarising a lacquer layer.

摘要翻译： 本公开涉及用漆涂覆基材的方法。 首先，将漆均匀地涂布在基材上。 然后，施加到基材上的漆的溶剂比例降低，将涂布的基材暴露于溶剂气氛。 在一些实施方案中，加热漆。 本发明还涉及一种用于平整漆层的装置。

公开(公告)号：US11247229B2

公开(公告)日：2022-02-15

申请号：US16256280

申请日：2019-01-24

申请人： SUSS MicroTec Lithography GmbH

发明人： Katrin Fischer ,  Florian Palitschka ,  Johannes Platen ,  Kento Kaneko

IPC分类号： B05D3/04 ,  B05D3/02 ,  G03F7/16 ,  B05C9/12 ,  G03F7/00 ,  B05D3/10 ,  B05D7/04 ,  B05D5/00 ,  B05D7/26

摘要： The disclosure relates to a method for coating a substrate with a lacquer. First, the lacquer is uniformly applied to the substrate. Then, the solvent proportion of the lacquer applied to the substrate is reduced, and the coated substrate is exposed to a solvent atmosphere. In some embodiments, the lacquer is heated. The invention also relates to a device for planarising a lacquer layer.

公开(公告)号：US20160089691A1

公开(公告)日：2016-03-31

申请号：US14861117

申请日：2015-09-22

申请人： SUSS MicroTec Lithography GmbH

发明人： Katrin Fischer ,  Florian Palitschka ,  Johannes Platen ,  Kento Kaneko

IPC分类号： B05D1/02 ,  B05B1/12

摘要： A method for coating a substrate with a lacquer includes spraying lacquer onto the substrate and subsequently spraying the applied lacquer with solvent. In some embodiments, before the solvent is sprayed the lacquer is heated. Also disclosed is a corresponding coating device for lacquering substrates.

摘要翻译： 用漆涂布基材的方法包括将漆喷涂到基材上，随后用溶剂喷涂所涂漆剂。 在一些实施方案中，在喷涂溶剂之前，加热漆。 还公开了用于对基材进行涂漆的相应的涂覆装置。