Invention Application
- Patent Title: OPTICAL APPARATUS AND MANUFACTURING METHOD USING THE SAME
- Patent Title (中): 使用它的光学装置和制造方法
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Application No.: US14867292Application Date: 2015-09-28
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Publication No.: US20160097981A1Publication Date: 2016-04-07
- Inventor: SANGJOON HONG , JONGJIN LEE , HiKUK LEE , SANGDON JANG , Inbae CHANG
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Chuncheon KR Yongin
- Assignee: KNU-INDUSTRY COOPERATION FOUNDATION,SAMSUNG DISPLAY CO., LTD.
- Current Assignee: KNU-INDUSTRY COOPERATION FOUNDATION,SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Chuncheon KR Yongin
- Priority: KR10-2014-0135067 20141007
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03F7/16

Abstract:
An optical apparatus and a manufacturing method using the optical apparatus are disclosed. The optical apparatus includes a stage supporting a substrate, first optical systems providing a first light onto the substrate, a gantry supporting the first optical systems to transfer them on the stage, and second optical systems disposed between the gantry and the stage and detecting displacement of the first optical systems. Each of the second optical systems includes a beam source generating a second light different with the first light, and sensor arrays for sensing the second light provided to the first optical systems to detect displacement of the first optical systems.
Public/Granted literature
- US09690200B2 Optical apparatus and manufacturing method using the same Public/Granted day:2017-06-27
Information query
IPC分类: