发明申请
- 专利标题： ARC EVAPORATION COATING SOURCE HAVING A PERMANENT MAGNET
- 专利标题（中）： 具有永久磁铁的ARC蒸发涂层源
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申请号： US14786226申请日： 2014-04-17
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公开(公告)号： US20160099134A1公开(公告)日： 2016-04-07
- 发明人: MATTHIAS PERL , PETER POLCIK , CONRAD POLZER , STEFAN SCHLICHTHERLE , GEORG STRAUSS
- 申请人： PLANSEE SE
- 优先权： ATGM131/2013 20130422
- 国际申请： PCT/AT2014/000078 WO 20140417
- 主分类号： H01J37/34
- IPC分类号： H01J37/34 ; C23C14/35 ; C23C14/34
摘要：
An arc evaporation coating source includes a target made of a coating material to be vapor-deposited, a ferromagnetic yoke for influencing the vapor deposition of the coating material to be vapor-deposited and at least one permanent-magnetic body for influencing the vapor deposition of the coating material to be vapor-deposited. The ferromagnetic yoke is disposed in contact with the target. The permanent-magnetic body is fastened to the target by the ferromagnetic yoke.
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