发明申请
- 专利标题: ELECTROMECHANICAL CONVERSION ELEMENT, LIQUID DROP DISCHARGE HEAD AND IMAGE FORMING APPARATUS
- 专利标题(中): 电动转换元件,液体放电头和图像形成装置
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申请号: US14867350申请日: 2015-09-28
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公开(公告)号: US20160099402A1公开(公告)日: 2016-04-07
- 发明人: Satoshi Mizukami , Takahiko KURODA , Masahiro ISHIMORI
- 申请人: Satoshi Mizukami , Takahiko KURODA , Masahiro ISHIMORI
- 申请人地址: JP Tokyo
- 专利权人: RICOH COMPANY, LTD.
- 当前专利权人: RICOH COMPANY, LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2014-203311 20141001; JP2014-203399 20141001
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; B41J2/14 ; H01L41/18
摘要:
An electromechanical conversion element includes a lower electrode formed directly or indirectly on a substrate or a base film; an electromechanical conversion film formed on the lower electrode and including a piezoelectric body having a perovskite crystal structure preferentially oriented with a {n00} plane where n is a positive integer; and an upper electrode formed on the electromechanical conversion film. A diffraction peak at a position 2θ at which a diffraction intensity has a maximum value and which corresponds to a (X00) plane or a (00X) plane, X being 1 or 2, obtained by θ-2θ measurement in X-ray diffraction measurement, shows a trapezoidal peak shape and has two or more bending points.
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