发明申请
US20160104128A1 MOBILE DEVICE USER INTERFACE FOR SUPPORTING SERVICE MAINTENANCE AND TRACKING ACTIVITIES IN SEMICONDUCTOR TOOL
审中-公开
用于支持半导体工具中的服务维护和跟踪活动的移动设备用户界面
- 专利标题： MOBILE DEVICE USER INTERFACE FOR SUPPORTING SERVICE MAINTENANCE AND TRACKING ACTIVITIES IN SEMICONDUCTOR TOOL
- 专利标题（中）： 用于支持半导体工具中的服务维护和跟踪活动的移动设备用户界面
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申请号： US14876203申请日： 2015-10-06
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公开(公告)号： US20160104128A1公开(公告)日： 2016-04-14
- 发明人: Simon Gosselin , Vincent Wong , Ronald Ramnarine , Neal K. Newton , Mukesh Shah , Kerwin Hoversten , Bob Ahrens , Marco Mora , Roger Patrick
- 申请人： Lam Research Corporation
- 主分类号： G06Q10/00
- IPC分类号： G06Q10/00
摘要：
Integration of semiconductor tool maintenance operations on mobile devices enables technicians to more accurately perform semiconductor tool maintenance, and allows for more accurate collection and analysis of data so that maintenance procedures and resulting tool operations can be more repeatable, consistent and efficient.
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