公开(公告)号：US09927798B2

公开(公告)日：2018-03-27

申请号：US14876213

申请日：2015-10-06

申请人： Lam Research Corporation

发明人： Roger Patrick ,  Chung Ho Huang ,  Simon Gosselin ,  Vincent Wong ,  Ronald Ramnarine ,  Neal K. Newton ,  Mukesh Shah ,  Kerwin Hoversten ,  Robert Ahrens ,  Marco Mora

IPC分类号： G06F19/00 ,  G05B19/4065

CPC分类号： G05B19/4065 ,  G05B2219/31202 ,  G05B2219/45031 ,  G05B2219/50185

摘要： Integration of semiconductor tool maintenance operations on mobile devices to allow technicians to more accurately perform semiconductor tool maintenance and to allow more accurate analysis of data to improve maintenance procedures to be more repeatable, consistent, and efficient. Remote control of maintenance operations for the semiconductor tool via a portable electronic device decreases the time required to service semiconductor tools and thus increase throughput.

公开(公告)号：US20160103445A1

公开(公告)日：2016-04-14

申请号：US14876213

申请日：2015-10-06

申请人： Lam Research Corporation

发明人： Roger Patrick ,  Chung Ho Huang ,  Simon Gosselin ,  Vincent Wong ,  Ronald Ramnarine ,  Neal K. Newton ,  Mukesh Shah ,  Kerwin Hoversten ,  Bob Ahrens ,  Marco Mora

IPC分类号： G05B19/4065

CPC分类号： G05B19/4065 ,  G05B2219/31202 ,  G05B2219/45031 ,  G05B2219/50185

摘要： Integration of semiconductor tool maintenance operations on mobile devices to allow technicians to more accurately perform semiconductor tool maintenance and to allow more accurate analysis of data to improve maintenance procedures to be more repeatable, consistent, and efficient. Remote control of maintenance operations for the semiconductor tool via a portable electronic device decreases the time required to service semiconductor tools and thus increase throughput.

摘要翻译： 将半导体工具维护操作集成到移动设备上，以使技术人员能够更精确地执行半导体工具维护，并允许更精确地分析数据，从而将维护过程改进为更可重复，一致和高效。 通过便携式电子设备远程控制半导体工具的维护操作减少了半导体工具的维护所需的时间，从而提高了吞吐量。

公开(公告)号：US20160104128A1

公开(公告)日：2016-04-14

申请号：US14876203

申请日：2015-10-06

申请人： Lam Research Corporation

发明人： Simon Gosselin ,  Vincent Wong ,  Ronald Ramnarine ,  Neal K. Newton ,  Mukesh Shah ,  Kerwin Hoversten ,  Bob Ahrens ,  Marco Mora ,  Roger Patrick

IPC分类号： G06Q10/00

CPC分类号： G06Q10/20

摘要： Integration of semiconductor tool maintenance operations on mobile devices enables technicians to more accurately perform semiconductor tool maintenance, and allows for more accurate collection and analysis of data so that maintenance procedures and resulting tool operations can be more repeatable, consistent and efficient.

摘要翻译： 将半导体工具维护操作集成到移动设备上，使技术人员能够更准确地执行半导体工具维护，并允许更精确地收集和分析数据，从而使维护程序和结果的工具操作更具可重复性，一致性和高效性。