Invention Application
- Patent Title: Electrically Controllable Integrated Switch
- Patent Title (中): 电控集成开关
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Application No.: US14985083Application Date: 2015-12-30
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Publication No.: US20160107886A1Publication Date: 2016-04-21
- Inventor: Christian Rivero , Pascal Fornara , Antonio di-Giacomo , Brice Arrazat
- Applicant: STMicroelectronics (Rousset) SAS
- Priority: FR1355221 20130606
- Main IPC: B81C1/00
- IPC: B81C1/00 ; H01H57/00

Abstract:
Methods of forming and operating a switching device are provided. The switching device is formed in an interconnect, the interconnect including a plurality of metallization levels, and has an assembly that includes a beam held by a structure. The beam and structure are located within the same metallization level. Locations of fixing of the structure on the beam are arranged so as to define for the beam a pivot point situated between these fixing locations. The structure is substantially symmetric with respect to the beam and to a plane perpendicular to the beam in the absence of a potential difference. The beam is able to pivot in a first direction in the presence of a first potential difference applied between a first part of the structure and to pivot in a second direction in the presence of a second potential difference applied between a second part of the structure.
Public/Granted literature
- US10510503B2 Electrically controllable integrated switch Public/Granted day:2019-12-17
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