Invention Application
- Patent Title: SEMICONDUCTOR DEVICE HAVING A TRENCH GATE AND METHOD FOR MANUFACTURING
-
Application No.: US14976526Application Date: 2015-12-21
-
Publication No.: US20160111508A1Publication Date: 2016-04-21
- Inventor: Christian Foerster , Georg Ehrentraut , Frank Pfirsch , Thomas Raker
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Priority: DE102007003812.9 20070125
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/66 ; H01L29/40 ; H01L29/10 ; H01L29/78 ; H01L29/739

Abstract:
A semiconductor device having a trench gate and method for manufacturing is disclosed. One embodiment includes a first semiconductor area and a second semiconductor area, a semiconductor body area between the first semiconductor area and the second semiconductor area, and a gate arranged in a trench and separated from the semiconductor body by an insulation layer, wherein the trench has a top trench portion which extends from the semiconductor surface at least to a depth which is greater than a depth of the first semiconductor area, wherein the trench further has a bottom trench portion extending subsequent to the top trench portion at least up to the second semiconductor area, and wherein the top trench portion has a first lateral dimension and the bottom trench portion has a second lateral dimension which is greater than the first lateral dimension.
Public/Granted literature
- US1748505A Building Public/Granted day:1930-02-25
Information query
IPC分类: