Invention Application
- Patent Title: METHOD FOR MANUFACTURING A PLURALITY OF NANOWIRES
- Patent Title (中): 制造多种纳米尺寸的方法
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Application No.: US14977719Application Date: 2015-12-22
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Publication No.: US20160111719A1Publication Date: 2016-04-21
- Inventor: Marko Lemke , Stefan Tegen , Uwe Rudolph
- Applicant: Infineon Technologies AG
- Main IPC: H01M4/38
- IPC: H01M4/38 ; H01M4/66 ; H01M10/0525 ; H01L29/06 ; H01L29/16

Abstract:
A method for manufacturing a plurality of nanowires, the method including: providing a carrier comprising an exposed surface of a material to be processed and applying a plasma treatment on the exposed surface of the material to be processed to thereby form a plurality of nanowires from the material to be processed during the plasma treatment.
Public/Granted literature
- US10483535B2 Apparatus comprising a plurality of nanowires Public/Granted day:2019-11-19
Information query