Invention Application
- Patent Title: METHOD OF FORMING DIAMOND CONDITIONERS FOR CMP PROCESS
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Application No.: US14987843Application Date: 2016-01-05
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Publication No.: US20160114460A1Publication Date: 2016-04-28
- Inventor: Yen-Chang CHAO , Kei-Wei CHEN , Ying-Lang WANG
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsin-Chu
- Main IPC: B24B53/12
- IPC: B24B53/12

Abstract:
A method for making a conditioner disk used in a chemical mechanical polishing (CMP) process comprises applying a first layer of at least one binder over a substrate; disposing a plurality of diamond particles on the first layer of the at least one first binder at the plurality of locations; and fixing the plurality of diamond particles to the substrate by heating the substrate to a raised temperature and then cooling the substrate. The plurality of diamond particles disposed over the substrate are configured to provide a working diamond ratio higher than 50% when the conditioner disk is used in a CMP process.
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