Invention Application
US20160115583A1 DEVICE AND METHOD FOR VACUUM EVAPORATING 审中-公开
真空蒸发的装置和方法

DEVICE AND METHOD FOR VACUUM EVAPORATING
Abstract:
A device for vacuum evaporating includes a thermal evaporation module that generates vapor in a vacuum chamber through a circular opening by heating a vapor evaporation material accommodated therein. A moving stage is positioned in an atmospheric area separated from the vacuum chamber and adjusts a position of the thermal evaporation module under the thermal evaporation module. A sealing part is combined with the thermal evaporation module to isolate the vacuum chamber and the atmospheric area from each other and maintain a vacuum state of the vacuum chamber while surrounding the thermal evaporation module and permitting movement of the thermal evaporation module.
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