公开(公告)号：US20160115583A1

公开(公告)日：2016-04-28

申请号：US14726257

申请日：2015-05-29

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： JI-HO UH ,  Jun-Sung Lee

IPC: C23C14/24 ,  C23C14/54

CPC classification number: C23C14/243 ,  C23C14/24 ,  C23C14/54

Abstract: A device for vacuum evaporating includes a thermal evaporation module that generates vapor in a vacuum chamber through a circular opening by heating a vapor evaporation material accommodated therein. A moving stage is positioned in an atmospheric area separated from the vacuum chamber and adjusts a position of the thermal evaporation module under the thermal evaporation module. A sealing part is combined with the thermal evaporation module to isolate the vacuum chamber and the atmospheric area from each other and maintain a vacuum state of the vacuum chamber while surrounding the thermal evaporation module and permitting movement of the thermal evaporation module.

Abstract translation: 用于真空蒸发的装置包括热蒸发模块，其通过加热容纳在其中的蒸气蒸发材料通过圆形开口在真空室中产生蒸气。 移动台位于与真空室分离的大气区域中，并调节热蒸发模块在热蒸发模块下方的位置。 密封部分与热蒸发模块组合以将真空室和大气区域彼此隔离，并且在围绕热蒸发模块并且允许热蒸发模块的移动的同时保持真空室的真空状态。