Invention Application
US20160118480A1 METHODS OF FORMING A TRI-GATE FINFET DEVICE AND THE RESULTING DEVICE
有权
形成三栅极晶体管器件和结果器件的方法
- Patent Title: METHODS OF FORMING A TRI-GATE FINFET DEVICE AND THE RESULTING DEVICE
- Patent Title (中): 形成三栅极晶体管器件和结果器件的方法
-
Application No.: US14525288Application Date: 2014-10-28
-
Publication No.: US20160118480A1Publication Date: 2016-04-28
- Inventor: Ruilong Xie , Andreas Knorr
- Applicant: GLOBALFOUNDRIES Inc.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/12 ; H01L21/8234 ; H01L29/78

Abstract:
One illustrative method disclosed herein includes, among other things, forming a fin that is positioned above and vertically spaced apart from an upper surface of a semiconductor substrate, the fin having an upper surface, a lower surface and first and second side surfaces, wherein an axis of the fin in a height direction of the fin is oriented substantially parallel to the upper surface of the substrate, and wherein a first side surface of the fin contacts a first insulating material, forming a gate structure around the upper surface, the second side surface and the lower surface of the fin, and forming a gate contact structure that is conductively coupled to the gate structure.
Public/Granted literature
- US09614056B2 Methods of forming a tri-gate FinFET device Public/Granted day:2017-04-04
Information query
IPC分类: