Invention Application
- Patent Title: THIN-FILM TRANSISTOR AND METHOD FOR MANUFACTURING SAME
- Patent Title (中): 薄膜晶体管及其制造方法
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Application No.: US14889919Application Date: 2014-05-02
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Publication No.: US20160118501A1Publication Date: 2016-04-28
- Inventor: Toshihide NABATAME , Kazuhito TSUKAGOSHI , Shinya AIKAWA , Toyohiro CHIKYO
- Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE
- Applicant Address: JP Tsukuba-shi, Ibaraki
- Assignee: National Institute for Materials Science
- Current Assignee: National Institute for Materials Science
- Current Assignee Address: JP Tsukuba-shi, Ibaraki
- Priority: JP2013-099284 20130509; JP2013-139425 20130703; JP2014-016266 20140131
- International Application: PCT/JP2014/062188 WO 20140502
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L21/02 ; H01L21/40 ; H01L29/66

Abstract:
The present invention provides a thin-film transistor in which transistor characteristics such as drain current and threshold voltage are improved, and a method of manufacturing the same. The present invention provides a thin-film transistor provided with a source electrode (108), a drain electrode (109), a semiconductor layer (105), a gate electrode (103), and an insulating layer (104); wherein the semiconductor layer (105) contains a composite metal oxide obtained by adding to a first metal oxide an oxide having an oxygen dissociation energy that is at least 200 kJ/mol greater than the oxygen dissociation energy of the first metal oxide, whereby the amount of oxygen vacancy is controlled; and the insulating layer (104) is provided with an SiO2 layer, a high-permittivity first layer, and a high-permittivity second layer, whereby the dipoles generated at the boundary between the SiO2 layer and the high-permittivity layers are used to control the threshold voltage.
Public/Granted literature
- US09741864B2 Thin-film transistor and method for manufacturing same Public/Granted day:2017-08-22
Information query
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