Invention Application
- Patent Title: THIN FILM DEPOSITION
- Patent Title (中): 薄膜沉积
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Application No.: US14988948Application Date: 2016-01-06
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Publication No.: US20160118623A1Publication Date: 2016-04-28
- Inventor: Ruiqing MA , Chuanjun XIA , Prashant MANDLIK
- Applicant: UNIVERSAL DISPLAY CORPORATION
- Main IPC: H01L51/52
- IPC: H01L51/52 ; H01L51/00 ; H01L51/56
Abstract:
A method of preparing a surface for deposition of a thin film thereon, wherein the surface including a plurality of protrusions extending therefrom and having shadowed regions, includes locally treating at least one of the protrusions.
Public/Granted literature
- US09735392B2 Thin film deposition Public/Granted day:2017-08-15
Information query
IPC分类:
