Invention Application
- Patent Title: MICRO-ELECTRIC MECHANICAL SYSTEM CONTROL VALVE AND METHOD FOR CONTROLLING A SENSITIVE FLUID
- Patent Title (中): 微机电系统控制阀和控制敏感流体的方法
-
Application No.: US14919953Application Date: 2015-10-22
-
Publication No.: US20160123498A1Publication Date: 2016-05-05
- Inventor: Parthiban Arunasalam , E. Nelson Fuller , Joe A. Ojeda, Sr.
- Applicant: DunAn Microstaq. Inc.
- Applicant Address: US TX Austin
- Assignee: DUNAN MICROSTAQ, INC.
- Current Assignee: DUNAN MICROSTAQ, INC.
- Current Assignee Address: US TX Austin
- Main IPC: F16K99/00
- IPC: F16K99/00

Abstract:
A valve assembly is configured to regulate the flow of an isolated fluid therethrough and includes a first valve stage configured to control the flow of a first fluid through a first fluid circuit, and a second valve stage configured to control the flow of a second fluid through a second fluid circuit. The first valve stage is connected to the second valve stage such that the first fluid acts on the second valve stage to move the second valve stage between open and closed positions. The second fluid flowing through the second valve stage is also isolated from the first fluid flowing through the first valve stage.
Public/Granted literature
- US09970572B2 Micro-electric mechanical system control valve and method for controlling a sensitive fluid Public/Granted day:2018-05-15
Information query