Invention Application
- Patent Title: MICRO ELECTRO-MECHANICAL HEATER
- Patent Title (中): 微电子机械加热器
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Application No.: US14948549Application Date: 2015-11-23
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Publication No.: US20160123859A1Publication Date: 2016-05-05
- Inventor: Yunje Oh , Syed Amanulla Syed Asif , Edward Cyrankowski , Oden Lee Warren
- Applicant: Hysitron, Inc.
- Main IPC: G01N1/42
- IPC: G01N1/42 ; H05B1/02 ; H05B3/22 ; G01N3/08

Abstract:
A sub-micron scale property testing apparatus including a test subject holder and heating assembly. The assembly includes a holder base configured to couple with a sub-micron mechanical testing instrument and electro-mechanical transducer assembly. The assembly further includes a test subject stage coupled with the holder base. The test subject stage is thermally isolated from the holder base. The test subject stage includes a stage subject surface configured to receive a test subject, and a stage plate bracing the stage subject surface. The stage plate is under the stage subject surface. The test subject stage further includes a heating element adjacent to the stage subject surface, the heating element is configured to generate heat at the stage subject surface.
Public/Granted literature
- US09759641B2 Micro electro-mechanical heater Public/Granted day:2017-09-12
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