Invention Application
- Patent Title: ELECTROMAGNETIC MEMS DEVICE
- Patent Title (中): 电磁MEMS器件
-
Application No.: US14530375Application Date: 2014-10-31
-
Publication No.: US20160124214A1Publication Date: 2016-05-05
- Inventor: Barak Freedman , Nikolai Berkovitch , Arnon Hirshberg
- Applicant: Intel Corporation
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B7/02 ; B81C1/00 ; G02B26/10

Abstract:
Embodiments of the present disclosure are directed toward techniques and configurations for a magnetic MEMS apparatus that in some instances may comprise a magnetic circuit and a MEMS device. The magnetic circuit may include two magnets that may be disposed on the substantially flat base and magnetized vertically to the base and in opposite directions to each other to produce a substantially horizontal magnetic field between the magnets. The MEMS device may comprise a mirror and a conductor to pass electric current to interact with the magnetic field created by the magnets. The MEMS device may be disposed substantially between the magnets of the magnetic circuit and above a plane formed by top surfaces of the magnets, to provide an unobstructed field of view for the mirror. The MEMS device may include a ferromagnetic layer to concentrate the magnetic field toward the conductor. Other embodiments may be described and/or claimed.
Information query