Apparatus with a rotatable MEMS device

    公开(公告)号:US09664897B1

    公开(公告)日:2017-05-30

    申请号:US14883474

    申请日:2015-10-14

    Inventor: Arnon Hirshberg

    Abstract: Embodiments of the present disclosure are directed toward an apparatus with a rotatable MEMS device. The apparatus may include a magnetic circuit with two magnets disposed opposite each other to produce a magnetic field between the magnets. The MEMS device may be placed in a frame disposed between the magnets. The MEMS device may include a driving coil disposed around the device, and may be rotatable around a first axis of the frame, in response to application of electromagnetic force produced by interaction of electric current to pass through the driving coil, with the magnetic field. The frame may include another driving coil, and may be rotatable around a second axis orthogonal to first axis, in response to application of electromagnetic force produced by interaction of electric current to pass through the second driving coil, with the magnetic field. Other embodiments may be described and/or claimed.

    ELECTROMAGNETIC MEMS DEVICE
    5.
    发明申请
    ELECTROMAGNETIC MEMS DEVICE 审中-公开
    电磁MEMS器件

    公开(公告)号:US20160124215A1

    公开(公告)日:2016-05-05

    申请号:US14971070

    申请日:2015-12-16

    Abstract: Embodiments of the present disclosure are directed toward an apparatus comprising a frameless MEMS device with a two-dimensional (2D) mirror, in accordance with some embodiments. The apparatus may include a base and a MEMS device disposed on the base. The MEMS device may comprise a rotor having a driving coil disposed around the rotor that is partially rotatable around a first axis, in response to interaction of a first magnetic field provided parallel to the first axis, with electric current to pass through the driving coil. The MEMS device may include a mirror disposed about a middle of the rotor. The mirror may be partially rotatable around a second axis coupled with the rotor and orthogonal to the first axis, in response to interaction of a second magnetic field provided parallel to the second axis, with electric current to pass through the coil. Other embodiments may be described and/or claimed.

    Abstract translation: 根据一些实施例,本公开的实施例涉及一种包括具有二维(2D)镜的无框MEMS装置的装置。 该装置可以包括设置在基座上的底座和MEMS装置。 MEMS器件可包括转子,该转子具有围绕转子设置的驱动线圈,该驱动线圈响应于平行于第一轴线的第一磁场的相互作用而与第一轴线部分旋转,并与电流通过驱动线圈。 MEMS器件可以包括围绕转子的中间设置的反射镜。 响应于平行于第二轴设置的第二磁场与电流通过线圈的相互作用,反射镜可以围绕与转子耦合并与第一轴垂直的第二轴部分地旋转。 可以描述和/或要求保护其他实施例。

    ELECTROMAGNETIC MEMS DEVICE
    8.
    发明申请
    ELECTROMAGNETIC MEMS DEVICE 审中-公开
    电磁MEMS器件

    公开(公告)号:US20160124214A1

    公开(公告)日:2016-05-05

    申请号:US14530375

    申请日:2014-10-31

    Abstract: Embodiments of the present disclosure are directed toward techniques and configurations for a magnetic MEMS apparatus that in some instances may comprise a magnetic circuit and a MEMS device. The magnetic circuit may include two magnets that may be disposed on the substantially flat base and magnetized vertically to the base and in opposite directions to each other to produce a substantially horizontal magnetic field between the magnets. The MEMS device may comprise a mirror and a conductor to pass electric current to interact with the magnetic field created by the magnets. The MEMS device may be disposed substantially between the magnets of the magnetic circuit and above a plane formed by top surfaces of the magnets, to provide an unobstructed field of view for the mirror. The MEMS device may include a ferromagnetic layer to concentrate the magnetic field toward the conductor. Other embodiments may be described and/or claimed.

    Abstract translation: 本公开的实施例涉及在一些情况下可以包括磁路和MEMS装置的磁MEMS装置的技术和配置。 磁路可以包括两个磁体,其可以设置在基本上平坦的基底上并且垂直于基底并且彼此相反的方向被磁化,以在磁体之间产生基本上水平的磁场。 MEMS器件可以包括反射镜和导体以传递电流以与由磁体产生的磁场相互作用。 MEMS器件可以基本上设置在磁路的磁体之间并且在由磁体的顶表面形成的平面之上,以为镜提供无障碍的视场。 MEMS器件可以包括将磁场集中到导体的铁磁层。 可以描述和/或要求保护其他实施例。

    MEMS scanning mirror field of view provision methods and apparatus
    9.
    发明授权
    MEMS scanning mirror field of view provision methods and apparatus 有权
    MEMS扫描镜视野提供方法和装置

    公开(公告)号:US09116350B2

    公开(公告)日:2015-08-25

    申请号:US13997986

    申请日:2013-03-11

    CPC classification number: G02B26/105 G02B26/0833

    Abstract: Embodiments of the present disclosure provide techniques and configurations for an optoelectronic assembly including a MEMS scanning mirror. In one embodiment, the MEMS scanning mirror may include a micro-scale mirror configured to be rotatable about a chord axis of the mirror to deflect an incident light beam into an exit window of the optoelectronic assembly, and a support structure configured to host the mirror to provide a light delivery field between a mirror surface and the exit window such that a path of the deflected light beam via the provided light delivery field to the exit window is un-obstructed. Other embodiments may be described and/or claimed.

    Abstract translation: 本公开的实施例提供了包括MEMS扫描镜的光电组件的技术和配置。 在一个实施例中,MEMS扫描反射镜可以包括微尺度反射镜,其被配置为围绕反射镜的弦线可旋转以将入射光束偏转到光电组件的出射窗口中;以及支撑结构,被配置为承载镜 以在镜面和出射窗之间提供光输送场,使得通过所提供的光输送场的偏转光束的路径不受阻挡。 可以描述和/或要求保护其他实施例。

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