Invention Application
- Patent Title: PLASMA PROCESSING APPARATUS
- Patent Title (中): 等离子体加工设备
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Application No.: US14934091Application Date: 2015-11-05
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Publication No.: US20160126065A1Publication Date: 2016-05-05
- Inventor: Jun YAMAWAKU , Tatsuo MATSUDO , Chishio KOSHIMIZU
- Applicant: TOKYO ELECTRON LIMITED
- Priority: JP2014-225230 20141105
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
A plasma processing apparatus includes a plasma generation unit for converting a processing gas into plasma by an inductive coupling. The plasma generation unit includes a first high frequency antenna formed of a vortex coil having open opposite endse and, at a central portion of a line between the open ends, a supply point of a high frequency power and a grounding point grounded through a capacitor; a second high frequency antenna formed of a planar vortex coil disposed between first and second high frequency antenna elements of the first high frequency antenna; and an impedance adjustment unit for adjusting a resonant frequency of a circuit viewed from a high frequency power supply toward the first high frequency antenna which is configured to have two resonant frequencies depending on adjustment of the impedance adjustment unit when the frequency of the high frequency power is changed.
Information query