Invention Application
- Patent Title: DIAGNOSIS SYSTEM FOR PULSED PLASMA
- Patent Title (中): 脉冲等离子体诊断系统
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Application No.: US14827347Application Date: 2015-08-17
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Publication No.: US20160126068A1Publication Date: 2016-05-05
- Inventor: Dong-soo LEE , Sung-ho JANG , Byeong-hee KIM , Doug-yong SUNG , Dong-ok SHIN
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Priority: KR10-2014-0152086 20141104
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01J37/244 ; G01J1/44
Abstract:
A diagnosis system for pulsed plasma includes an optical emission sensor (OES) to receive light generated the pulsed plasma, the pulsed plasma having been generated in accordance with a pulse signal, a digitizer to synchronize the electrical signal with the pulse signal, and an analyzer to analyze the synchronized electrical signal.
Public/Granted literature
- US09564295B2 Diagnosis system for pulsed plasma Public/Granted day:2017-02-07
Information query
